120k ultrasonic Photoresist spray coating machine with External liquid supply

120k ultrasonic Photoresist spray coating machine with External liquid supply

Photoresist atomization spraying is a core process in semiconductor manufacturing for precise photoresist coating. The key principle is to transform photoresist into tiny droplets through atomization technology, which are then uniformly deposited on the wafer surface, meeting the coating requirements of high-precision, large-size wafers.

Core Principle: Liquid photoresist is atomized into uniform droplets at the nanometer to micrometer scale using high-pressure gas flow or ultrasonic vibration.

The atomized droplets are then transported by a directional gas flow, forming a thin and uniform coating on the wafer surface, with the thickness precisely controlled at the nanometer level.

Key Advantages: High coating uniformity, avoiding the edge-thick and center-thin defects of spin coating, meeting the requirements of advanced processes.

High photoresist utilization, reducing material waste by more than 50% compared to spin coating, lowering production costs.

Suitable for large-size wafers (e.g., 12 inches and above) and complex surface topography, resulting in stronger coating consistency.

What is the parameter of the spray nozzle?

Do you have the spray nozzle pictures?

Ultrasonic nano-atomization uses ultrasonic energy to convert liquids into nano-sized particles. It has widespread applications in medical and industrial fields. The following is a detailed description:

Principle
In the medical field: An ultrasonic generator typically generates high-frequency current, which is converted into ultrasonic waves by an ultrasonic transducer. This current then acts on the liquid through an ultrasonic membrane at the bottom of the atomizer, breaking the medication into fine particles. Finally, the airflow generated by the air supply device delivers the medication mist to the patient for inhalation.
In the industrial field: An ultrasonic nozzle converts high-frequency sound waves into mechanical energy, which is transferred to the liquid, generating standing waves. The liquid is then directed through the nozzle to the atomizing surface. Upon exiting the atomizing surface, the liquid is broken into a uniform mist of micron-sized droplets, thus achieving atomization.

Features
Fine and uniform particles: The generated atomized particles typically range in diameter from 1 to 5 microns, remain suspended in the air for extended periods, and are relatively evenly distributed. In the medical field, this helps ensure better drug delivery to the lower respiratory tract and lungs. In the industrial field, it can achieve highly uniform submicron and nano-scale thin film coatings. High Efficiency and Energy Saving: Liquid is transferred to the spray nozzle by gravity or a low-pressure pump, achieving continuous or intermittent atomization. This process is clog-free, wear-free, noiseless, pressure-free, and has no moving parts. No cooling water is required for atomization, resulting in low energy consumption.

Material and Environmentally Friendly: The unpressurized, low-speed spray is easily controlled, and droplets land on the substrate rather than rebounding from it, significantly reducing overspray, saving significant material and reducing environmental emissions.

High Controllability: Precisely controllable atomization flow, low-flow continuous spray, and easy-to-control and shape spray patterns make it suitable for industrial applications. Through combination, the atomization volume can be tailored to meet any user requirement. Applications
Medical: For example, ophthalmic ultrasonic atomization devices use this technology to break down medications into nano-sized atomized particles for the treatment of dry eye and blepharitis. This technology promotes drug absorption, alleviates dry eye symptoms, and improves periocular microcirculation. In respiratory medicine, nanobubble-assisted ultrasonic atomization technology can directly atomize medications and nanobubbles into fine aerosols, increasing drug deposition in the lungs and used to treat conditions such as lung cysts.

Industrial: Applications include fuel cells, thin-film photovoltaic cells, thin-film solar coatings, perovskite solar cells, graphene coatings, glass coatings, and electronic circuits, enabling highly uniform submicron and nanometer-scale thin-film coatings.

Landscaping: In landscape gardens and commercial spaces, ultrasonic atomization modules can create a shrouded mist effect, increasing air humidity and improving the indoor microclimate. They can also be combined with lighting effects to create a spectacular, color-shifting mist spectacle.

How do ultrasonic spray nozzles compare to traditional spray nozzles in terms of efficiency?
Ultrasonic spray nozzles outperform traditional spray nozzles in overall efficiency, especially for high-precision coating scenarios like photoresist application.

Core Efficiency Advantages of Ultrasonic Spray Nozzles

Higher material utilization: They atomize photoresist into uniformly sized micro/nanodroplets, reducing waste by 30–60% compared to traditional nozzles (e.g., pressure-driven types) that often produce uneven droplets or overspray.
Superior coating uniformity: Ultrasonic vibration enables consistent droplet distribution, minimizing thickness variations (typically within ±5% vs. ±10–15% for traditional nozzles), which reduces rework and improves process yield.
Lower energy consumption: Ultrasonic atomization relies on high-frequency vibration rather than high pressure or airflow, cutting energy use by 20–40% while maintaining spray performance.

Limitations Relative to Traditional Nozzles

Narrower applicability for high-viscosity materials: Traditional pressure nozzles handle thicker fluids more effectively, whereas ultrasonic types work best with low-to-medium viscosity photoresists.
Higher initial cost: Ultrasonic nozzles have a higher upfront investment, though this is offset by long-term material and energy savings in mass production.

Ultrasonic spray nozzles offer several advantages over traditional spray nozzles in terms of efficiency. Here are some key points of comparison:

1. Atomization Efficiency: Ultrasonic spray nozzles are highly efficient in atomizing liquids into fine droplets. 

2. Reduced Overspray: Traditional spray nozzles often generate a significant amount of overspray, which refers to the loss of liquid that doesn't reach the intended target. 

3. Coating Quality: Ultrasonic spray nozzles are particularly advantageous in applications where a high-quality coating is required. 

4. Material Savings: Due to their efficient atomization and reduced overspray, ultrasonic spray nozzles can help save on material costs. 

5. Versatility: Ultrasonic spray nozzles can handle a wide range of liquids, including water-based solutions, solvents, suspensions, and viscous fluids. 

It's worth noting that traditional spray nozzles have their own advantages in certain scenarios, such as high-flow applications or situations where larger droplets are desired. The choice between ultrasonic spray nozzles and traditional spray nozzles depends on the specific requirements of the application and the desired outcome in terms of efficiency, coating quality, and material savings.
Can you provide examples of industries or applications where ultrasonic spray nozzles are commonly used?

 

Ultrasonic spraying system
The ultrasonic spraying equipment has self-cleaning, which can avoid pollution of the inner wall of the blood collection tube during the spraying process, and can also avoid the contamination of its own nozzle, and can be sprayed and used in cycles. The ultrasonic spraying system can program the number, distance, thickness and other parameters of spraying, so as to ensure the accuracy of the spraying effect. Ultrasonic spraying equipment can save raw materials, and the utilization rate of raw materials is as high as 85%. Industrial ultrasonic atomizers can be easily retrofitted into existing production lines for efficient spraying with consistent quality output.

As an industrially proven technology, ultrasonic spraying has been successfully applied to high-performance thin film coating lines in the manufacturing of precision electronics such as semiconductors, precision devices, nanotechnology applications, fuel cells and solar cells. During ultrasonic spraying, the size and distribution of droplets can be precisely controlled, resulting in particles with a high surface area.

Can you provide the working video of the spray nozzle?